- Description
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Details
SPECIFICATION
ModelSEF800-N Pick-up
(PU-DJ2S-60)
Detection methodDifferential Transformer
Measuring Range600 µm
Accuracy≤ ± 3%
Resolution0.04 – 10 nm
Straightness0.2 μm/100mm or Less
Measuring Force0.75 mN
StylusDiamond, Tip radius: 2 μm ±25%, angle 60° Skid
Curvature radius: 40 mm (measuring direction), SapphireAnalysis items
1) JIS B06011982 - Ra, Rmax, Rz
2) JIS B06011994 - Ra, Ry, Rz, S, Sm, tp
3) JIS B0610-1987 - Wca, Wcm, Wem, Wea
4) JIS B0601-2013 (JIS B0601-2001, ISO 42871997) - Pp, Pv, Pz, Pc, Pt, Pa, Pq, Psk, Pku, PPc, PSm, PΔq, Pmr(c), Pδc, Pmr, Rp, Rv, Rz, Rc, Rt, Ra, Rq, Rsk, Rku, RPc, RSm, RΔq, Rmr(c), Rδc, Rmr, Wp, Wv, Wz, Wc, Wt, Wa, Wq, Wsk, Wku, WPc, WSm, WΔq, Wmr(c),Wδc, Wmr
5) JIS B0631-2000 - AR, R, Rx, Rke, Rpke, Rvke
6) JIS B0671-1, -2, -3, -2002 (ISO 13565-1, -2, -3, -1996) - Rk, Rpk, Rvk, Mr1, Mr2, Rpq, Rvq, Rmq
7) ISO 12085, 1996 - AR, R, Rx, Rke, Rpke, Rvke
8) ASME B46.1・11995 - Ra, Rq, Rt, Rp, Rv, Sm, Pc, Rsk, Rku, tp, HSC,Δq,Δa, Rmax, Rz, Rpm, λa, λq, Wt, Wa, Wq, Wp, Wv, Wmr(c)Pick-up
(PU-FN30)
Detection methodDigital scale
Measuring Range60 mm
Accuracy± (1+0.04H) μm, H = Z displacement (mm)
Resolution0.05 μm
Straightness1.0 μm/100mm or Less
Traceable AngleAscend: 77°(Smooth Surface), Descend: 87° Stylus
Tungsten carbide, Tip radius: 25μm ±15%, angle 8°
Measuring Force10 – 30 mN
Measuring directionUp/Down, Push/Pull Other functions
Stylus motorized vertical motion function, Vibrator function, Overload protector function, Measuring range (upper limit) warning functionDrive unit
Drive range100mm Accuracy
± (1+0.02L) μm, L = Measuring Length (mm)
Scale resolution0.01 μm
Measuring speed0.02, 0.05, 0.1, 0.2, 0.5, 1.0, 2.0, 3.0 mm/s Driving speed
0.5, 30 mm/s (by remote controller), 80 mm/s (Selectable during macro measurement)
Drive motion operationRemote controller switch
Dimensions / WeightW385 × D130 × H140 mm / 9 kg Motorized column
Vertical motion range250 mm, (Pick-up for contour measurement)
Vertical motion limitOperating range can be set by software Vertical motion speed
0.05 - 50 mm/s
10, 50 mm/s (by remote controller, Up)
5, 30 mm/s (by remote controller, Down)
Vertical motion operationRemote controller switch
Auto-stop accuracy±0.2 µm (Using skid, vertical magnification set at100,000 times) Dimensions / Weight
W 650 × D 335 × H 774 mm / 75 kg
Maximum load70 kg
Depth from pick-up105 mm
Bed materialGabbro Additional function
Amcro-function, Remote control function (Coordinate display, Emergency switch, Auto up/down, Control of drive unit and motorized column)
Free-layout printed, Warning buzzer at overscale, Save format (CSV, DXF)
Alignment, Element analysis, Scalar analysis, Pitch analysis, Area analysis, Ball screw analysis and Statistical analysis, Arithmetic operation
Installation areaW1580 x D800 mm Power Supply
Single Phase AC90V-240V, 50/60Hz, 200VA
3D ROUGHNESS MEASUREMENT (OPTIONAL)
Motorized stage (RAF-22D)
Dimensions of stage150 × 150 mm
Leveling range±1°(X,Y)
Motion range of the stage50 mm
Minimum stepping range1 µm
Maximum load5 kg
Dimensions / WeightW312 × D150 × H70 mm / 8 kg Analysis items
Flat map - Direct contour map, Monochrome contour map,Differential contour map
Bird’ s eye view - Scan display, Halftone dot meshing display,Contour display, Differential scatter display
3D parameter - SRp, SRv, SRmax, Sra, SGr, SSr, SRz, SRq, SRsk, SΔa, Sλa, Spc
Particle analysis - Histogram of Peak (Valley) Number of particle (1 level mode), Density of particle, Average of square, Average of Volume, Average of diameter (Plural level mode),Each graphic display and the list of values
Graph - FFT, BC - Reviews
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Feature