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Kosaka Microfigure Measuring Instrument ET5000

Kosaka Microfigure Measuring Instrument ET5000

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ET5000 can automatically measure large-size samples up to size 880 × 680 mm application with high accuracy. Loading\Unloading sample stage is available an optional.
Used for fully automatic measurement of large size samples

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SPECIFICATION

Model	ET5000
Max. sample size	880 × 680 mm
Repeatability	1 σ 1 nm
Measuring range	Z: 100 μm X: 100 mm
Resolution	Z: 0.1 nm X: 0.1 μm
Measuring force	0.5 - 500 μN

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