Kosaka Microfigure Measuring Instrument ET4000

Kosaka Microfigure Measuring Instrument ET4000

฿0.00

Excellent in accuracy, stability and functionality, ET4000 is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application. ET4000 series can be selected from a number of models according to applications.

- Stable repeatability
- Measuring with microscopic measuring force minimum 0.5 µN
- Automatic leveling system
- Step high difference and surface roughness analysis
- Automatic measuring is corresponded.

ET4000A: Multifunctional and automatic
ET4000L: Fully automatic, compatible with large precision glass or wafer size sample
ET4000M: Reasonable, high performance and general-use


Brand KOSAKA
OR
Description

Details

SPECIFICATION


Model

ET4000

Max. sample size

210x210 mm to 300x400 mm
Measuring range
Z: 100 μm,  X: 100 mm
( Y stroke: 150 to 400 mm )


Resolution

Z: 0.1 nm,  X: 0.01 μm

Straightness (ET4000A)

0.1 μm / 100 mm

Repeatability

σ within 0.5 nm

Measuring force

0.5 μN to 500 μN

Stylus Arm

R 2μm 60°

Installation area

W1600 x D800 mm
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