CHOTEST Nano Optical Surface Profilometer SuperView W1

Details

FEATURES

1. High precision and high repeatability

- Based on the rotating confocal optical system, combined with high stability structural design and excellent 3D reconstruction algorithm, the measurement system is jointly composed to ensure thehigh measurement accuracy of the instrument.
- The unique shock isolation design can reduce the vibration noise of the bottom surface, the instrument is stable and reliable in most environments, and has good measurement repeatability

2. All-in-one operation of measurement analysis software

- The measurement and analysis are operated on the same interface without switching, and the measurement data is automatically counted, realizing the function of rapid batch measurement
- The visualization window is convenient for users to observe the scanning process in real time
- Combined with the automatic measurement function of the custom analysis template, the multi-region measurement and analysis can be automatically completed
- Five functional modules of geometric analysis, roughness analysis, structural analysis, frequency analysis and functional analysis.
- One-key analysis, multi-file analysis, free combination analysis items are saved as analysis templates, one-key analysis of batch samples, and data analysis and statistical chart functions are provided
- More than 300 kinds of 2D and 3D parameters can be measured according to ISO/ASME/EUR/GBT

3. Precision joystick

The joystick integrated with the displacement adjustment functions in the three directions of X, Y, and Z can quickly complete the pre-measurement works such as stage translation and 2-way focusing etc.

4. Double anti-collision protection measures

In addition to the software ZSTOP setting the lower limit of the Z-direction displacement for anti-collision protection, a mechanical and electronic sensor is designed on the Z-axis. When the lens touches the surface of the sample, the instrument automatically enters an emergency stop state to protect the instrument to the greatest extent and reduce the risk of human operation.

TECHNICAL PARAMETERS

Model No.		VT6100	VT6200	VT6300
Travel Range	X	100mm	200mm	300mm
	Y	100mm	200mm	300mm
	Z	100mm	100mm	100mm
Size		520×380×600mm	720×580×1500mm	1000×900×1500mm
Weight		50kg	400kg	500kg
Principle		Spinning disk confocal optical system	Spinning disk confocal optical system	Spinning disk confocal optical system
Objective Lens		50X (Optional: 10X, 20X, 100X)	50X (Optional: 10X, 20X, 100X)	50X (Optional: 10X, 20X, 100X)
Field of View		120×120 μm~1.2×1.2 mm	120×120 μm~1.2×1.2 mm	120×120 μm~1.2×1.2 mm
Step Height Measurment	Repeatability(1σ)	12nm	12nm	12nm
	Accuracy*1	± (0.2+L/100) μm	± (0.2+L/100) μm	± (0.2+L/100) μm
	Display Resolution	0.5nm	0.5nm	0.5nm
Width Measurement	Repeatability(1σ)	40nm	40nm	40nm
	Accuracy*2	± 2%	± 2%	± 2%
	Display Resolution	1nm	1nm	1nm
XY Object Table	Load Capacity	10kg	10kg	10kg
XY Object Table	Control Method	Motorized	Motorized	Motorized
Z-Axis Stroke Scanning Range		10 mm	10 mm	10 mm
Lens Turret		Motorized 5 holes turret	Motorized 5 holes turret	Motorized 5 holes turret
Light Source		White LED	White LED	White LED
Operating Environment	Power Supply	100~240V AC, 50/60Hz, 2A, Power 300W	100~240V AC, 50/60Hz, 2A, Power 300W	100~240V AC, 50/60Hz, 2A, Power 300W
	Working Temp.	15℃~30℃, fluctuation < 2℃/60min	15℃~30℃, fluctuation < 2℃/60min	15℃~30℃, fluctuation < 2℃/60min
	Humidity	5%~95%RH, no condensation	5%~95%RH, no condensation	5%~95%RH, no condensation
	Vibration	VC-C or better	VC-C or better	VC-C or better
	Other	No strong magnetic field	No strong magnetic field	No strong magnetic field

*1 Measure standard 4.7μm steps height block by 50× Objective lens in a laboratory environment
*2 Measure standard engraved line block by 50× Objective lens in a laboratory environment

Standard	Parameters
ISO 4287-1997		Principal section	Roughness	W>aviness
	Amplitude	Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku	Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku	Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
	interval	PSm,Pdq	RSm,Rdq	WSm,Wdq
	S>ubstance	Pmr,Pdc	Rmr,Rdc,Rmr(Rz/4)	Wmr,Wdc,Wmr(Wz/4)
	Peak	PPc	RPc	WPc
ISO 13565	ISO 13565-2	Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085	Roughness graph	R,AR,R× ,Nr
	Waviness graph	W,AW,W×,Wte
	Other graph	Rke,Rpke,Rvke
AMSE >B46.1	2D	Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:

2D Parameters

Standard	Parameters
ISO 4287-1997		Principal section	Roughness	W>aviness
	Amplitude	Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku	Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku	Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
	Interval	PSm,Pdq	RSm,Rdq	WSm,Wdq
	Substance	Pmr,Pdc	Rmr,Rdc,Rmr(Rz/4)	Wmr,Wdc,Wmr(Wz/4)
	Peak	PPc	RPc	WPc
ISO 13565	ISO 13565-2	Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085	Roughness graph	R,AR,R× ,Nr
	Waviness graph	W,AW,W×,Wte
	Other graph	Rke,Rpke,Rvke
AMSE >B46.1	2D	Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

3D Parameters

Standard	Parameters
ISO 25178	Height	Sq,Ssk,Sku,Sp,Sv,Sz,Sa
	function	Smr,Smc,S×p
	Space	Sal,Str,Std
	Composite parameters	Sdq,Sdr
	Volume	Vm,Vv,Vmp,Vmc,Vvc,Vvv
	Form	Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv
	Functional	Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq
ISO 12781	Flatness	FLTt,FLTp,FLTv,FLTq
EUR 15178N	Amplitude	Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St
	Space	Str,Std,Sal
	Composite parameters	Sdq,Sds,Ssc,Sdr,Sfd
	Area, Volume	Smr,Sdc
	Function	Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq
	Functional	Sbi,Sci,Svi
EUR 16145 EN	Amplitude	SaSq,Sy,Sz,Ssk,Sku
	Mixed parameters	Ssc,Sdq
	Functional	Sbi,Sci
	Space	Sdsrw
	Hardness	Hs,Hvol
ASME B46.1	3D	St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt