CHOTEST Nano Optical Surface Profilometer SuperView W1

Details

TECHNICAL PARAMETERS

Model No.*1		SuperView W1	SuperView W1-Pro	SuperView W1-Ultra	SuperView W1-Lite
Light source		White LED
Video system		1024×1024
Objective Lens		Standard: 10X (Optional: 2.5X, 5X, 20X, 50X, 100X)
Optical Zoom		Standard: 0.5X Optional: 0.375X, 0.75X, 1X			Standard: 0.5X Optional: 0.375X, 0.75X
Standard Field of View		0.98×0.98 mm
Lens Turret		Standard: Manual 3 holes turret Optional: Motorized 5 holes turret			Motorized 5 holes turret
XY Object table	Size	320×200mm	300×300mm	320x200mm	220x220mm
	Moving range	140×100mm	200×200mm	140x100mm	100x100mm
	Loading capacity	10kg
	Control method	Motorized
Tilt		±5°			±3°
Z Axis focusing	Travel range	100mm			50mm
	Control method	Motorized
Z Stroke Scanning Range		10mm
Surface Form Repeatability*2		0.1nm
Roughness RMS Repeatability*3		0.005nm
Step Height Measurementy*4		Accuracy: 0.3% Repeatability: 0.08%(1σ)			Accuracy: 0.5% Repeatability: 0.1%(1σ)
Scanning Speed@0.1nm resolution		1.85μm/s	1.85μm/s	8μm/s	1.85μm/s
Weight		<160KG			50kg
Size(LWH)		700x606x920mm			440x660x700mm
Stage measurement	Temperature	15°C~30°C, fuctuation <1°C/15min
	Humidity	5%~95% RH, no condensation
	Vibration	VC-C or better
	Software Noise Evaluation*5	3σ ≤ 4nm
	Compressed Air	0.6Mpa oil-free, water-free, 6mm diameter of hose
	Power Supply	AC100~240V, 50/60Hz, 4A, 300W
	Other	No strong magnetic field, No corrosive gas
1 W1 is the standard model of 3D Optical Surface Profilometer; W1-pro has larger stage size and travel range. W1-Ultra has greatly improved the scanning speed compared to W1. 2 Use EPSl mode to measure Sa 0.2nm silicon wafer in the laboratory environment; Single stripe, 80um filter for full field of view 3 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178. 4 Measure standard 4.7μm steps height block in a laboratory environment according to the ISO 5436-1:2000 *5 When the software noise evaluation is 4nm≤3σ≤10nm, the Roughness RMS repeatability is revised down to 0.015nm, the Step height measurement accuracy is revised down to 0.7%, and the step height measurement repeatability is revised down to 0.12%; When the software noise evaluation is 3σ>10nm, the environment does not meet the requirement for usage of the equipment, and need to change the site.

Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.

Standard	Parameters
ISO 4287-1997		Principal section	Roughness	W>aviness
	Amplitude	Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku	Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku	Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
	interval	PSm,Pdq	RSm,Rdq	WSm,Wdq
	S>ubstance	Pmr,Pdc	Rmr,Rdc,Rmr(Rz/4)	Wmr,Wdc,Wmr(Wz/4)
	Peak	PPc	RPc	WPc
ISO 13565	ISO 13565-2	Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085	Roughness graph	R,AR,R× ,Nr
	Waviness graph	W,AW,W×,Wte
	Other graph	Rke,Rpke,Rvke
AMSE >B46.1	2D	Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:

2D Parameters

Standard	Parameters
ISO 4287-1997		Principal section	Roughness	W>aviness
	Amplitude	Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku	Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku	Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
	Interval	PSm,Pdq	RSm,Rdq	WSm,Wdq
	Substance	Pmr,Pdc	Rmr,Rdc,Rmr(Rz/4)	Wmr,Wdc,Wmr(Wz/4)
	Peak	PPc	RPc	WPc
ISO 13565	ISO 13565-2	Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085	Roughness graph	R,AR,R× ,Nr
	Waviness graph	W,AW,W×,Wte
	Other graph	Rke,Rpke,Rvke
AMSE >B46.1	2D	Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009	Original profile	Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
	Roughness	Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
	Waviness	Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

3D Parameters

Standard	Parameters
ISO 25178	Height	Sq,Ssk,Sku,Sp,Sv,Sz,Sa
	function	Smr,Smc,S×p
	Space	Sal,Str,Std
	Composite parameters	Sdq,Sdr
	Volume	Vm,Vv,Vmp,Vmc,Vvc,Vvv
	Form	Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv
	Functional	Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq
ISO 12781	Flatness	FLTt,FLTp,FLTv,FLTq
EUR 15178N	Amplitude	Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St
	Space	Str,Std,Sal
	Composite parameters	Sdq,Sds,Ssc,Sdr,Sfd
	Area, Volume	Smr,Sdc
	Function	Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq
	Functional	Sbi,Sci,Svi
EUR 16145 EN	Amplitude	SaSq,Sy,Sz,Ssk,Sku
	Mixed parameters	Ssc,Sdq
	Functional	Sbi,Sci
	Space	Sdsrw
	Hardness	Hs,Hvol
ASME B46.1	3D	St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt