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  • CHOTEST White Light Interferometry SuperView WX100

CHOTEST White Light Interferometry SuperView WX100

CHOTEST White Light Interferometry SuperView WX100 CHOTEST White Light Interferometry SuperView WX100 CHOTEST White Light Interferometry SuperView WX100

CHOTEST White Light Interferometry SuperView WX100

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  • In-line roughness and 3D profile inspection

  • Measurement function: it can realize high precision Z scanning of sample surface and obtain 3D image.

  • Analysis function: It can obtain 2D and 3D data such as surface roughness, micro-nano-level contour size, etc.

  • Programming function: Support pre-configured data processing and analysis tool steps, one-click to complete the whole process from measurement to analysis.

  • Batch analysis: Data processing and analysis templates can be customized according to the customer demands, and one-click batch analysis can be realized for the same type of parameter data.

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Description

Details

 TECHNICAL PARAMETERS

Model No.
SuperView WX100 
Light Source
White LED
Video System
1024×1024
Objective Lens
10X ( 20X, 50X )
F.O.V
0.98×0.98mm
Lens Turret
Single hole
Size
230×200×380mm
Tilt
±2° Motorized

Z Travel Range

 30mm
Z Scanning Range
10mm (Depend on Lens)
Z Resolution
0.1nm

Reflectivity of Test Object

 0.05%~100%

Roughness RMS Repeatability*1

 0.01nm
Step Height
Measurement
Accuracy*2

 0.50%

Repeatability*2

 0.1% 1σ

Remark:
*1 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178
*2 Measure standard 4.7μm steps height block in a laboratory environment according to the ISO 5436-1:2000

Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.


Standard

 Parameters
ISO 4287-1997  
Principal section

 Roughness W>aviness
Amplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku
Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
interval PSm,Pdq RSm,Rdq
WSm,Wdq
S>ubstance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4)
Wmr,Wdc,Wmr(Wz/4)
Peak PPc RPc
WPc
ISO 13565
ISO 13565-2

 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085
Roughness graph

 R,AR,R× ,Nr

Waviness graph

 W,AW,W×,Wte

Other graph

 Rke,Rpke,Rvke
AMSE >B46.1  2D
Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010 Original profile
Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr
Roughness
Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr
Waviness
Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013 Original profile
Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr
Roughness
Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
Waviness
Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009 Original profile
Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness
Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
Waviness
Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:

2D Parameters


Standard

 Parameters
ISO 4287-1997  
Principal section

 Roughness W>aviness
Amplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku
Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
Interval PSm,Pdq RSm,Rdq
WSm,Wdq
Substance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4)
Wmr,Wdc,Wmr(Wz/4)
Peak PPc
RPc

 WPc
ISO 13565
ISO 13565-2

 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085
Roughness graph

 R,AR,R× ,Nr

Waviness graph

 W,AW,W×,Wte

Other graph

 Rke,Rpke,Rvke

AMSE >B46.1 

 2D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010
Original profile

 Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,

Roughness

 Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,

Waviness

 Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013
Original profile

 Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,

Roughness

 Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr

Waviness

 Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009
Original profile

 Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,

Roughness

 Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr

Waviness

 Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr


3D Parameters


Standard

 Parameters
ISO 25178 Height
Sq,Ssk,Sku,Sp,Sv,Sz,Sa
function
Smr,Smc,S×p
Space
Sal,Str,Std

Composite parameters

 Sdq,Sdr
Volume
Vm,Vv,Vmp,Vmc,Vvc,Vvv
Form
Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv
Functional
Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq
ISO 12781 Flatness
FLTt,FLTp,FLTv,FLTq
EUR 15178N Amplitude
Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St
Space
Str,Std,Sal
Composite parameters
Sdq,Sds,Ssc,Sdr,Sfd
Area, Volume
Smr,Sdc
Function
Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq
Functional
Sbi,Sci,Svi
EUR 16145 EN Amplitude
SaSq,Sy,Sz,Ssk,Sku

Mixed parameters

 Ssc,Sdq

Functional

 Sbi,Sci

Space

 Sdsrw

Hardness

 Hs,Hvol
ASME B46.1 3D
St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt
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