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CHOTEST 3D Optical Surface Profilometer SuperView W3

CHOTEST 3D Optical Surface Profilometer SuperView W3 CHOTEST 3D Optical Surface Profilometer SuperView W3 CHOTEST 3D Optical Surface Profilometer SuperView W3

CHOTEST 3D Optical Surface Profilometer SuperView W3

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SuperView W1 Series

3D Optical Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters  reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image.   The SuperView W1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.

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TECHNICAL PARAMETERS


Discription

 SuperView W3
Size
1000*900*1500mm
Weight
500 kg
Light source
White LED
Video system
1024×1024
Objective Lens
10X ( 2.5X, 5X, 20X, 50X, 100X )
Optical Zoom
0.5X ( 0.75X, 1X, 0.375X )
Standard Field of View
0.98×0.98 mm
Lens Turret
Motorized 5 holes-turret
XY Object table
450×450mm

300×300mm

10kg

Motorized
Tilt
±6° Motorized
Z Axis
100mm

Motorized

Z-Stoke Scanning Range

 10mm

Z Resolution

 0.1nm

Reflectivity of Object

 0.05%~100%

Roughness RMS Repeatability *1

 0.05%~100%
Stage Height Measurement
0.3%

0.08% 1σ

Enviromental Requirement

1. Operating environment: No strong magnetic field

 4. Environmental vibration: VC-C or better

2. Working temperature: 15°C~30°C fluctuation <2℃/60min

 5. Compressed air: 0.6Mpa oil-free, water-free

3. Relative humidity: 5%~95% RH, no condensation

 6. Power: 600W

Remark:
*1 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178
*2 Measure standard 4.7μm steps height block in a laboratory environment according to the ISO 5436-1:2000

Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.


Standard

 Parameters
ISO 4287-1997  
Principal section

 Roughness W>aviness
Amplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku
Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
interval PSm,Pdq RSm,Rdq
WSm,Wdq
S>ubstance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4)
Wmr,Wdc,Wmr(Wz/4)
Peak PPc RPc
WPc
ISO 13565
ISO 13565-2

 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085
Roughness graph

 R,AR,R× ,Nr

Waviness graph

 W,AW,W×,Wte

Other graph

 Rke,Rpke,Rvke
AMSE >B46.1  2D
Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010 Original profile
Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr
Roughness
Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr
Waviness
Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013 Original profile
Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr
Roughness
Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
Waviness
Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009 Original profile
Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
Roughness
Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
Waviness
Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr


※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:

2D Parameters


Standard

 Parameters
ISO 4287-1997  
Principal section

 Roughness W>aviness
Amplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku
Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku
Interval PSm,Pdq RSm,Rdq
WSm,Wdq
Substance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4)
Wmr,Wdc,Wmr(Wz/4)
Peak PPc
RPc

 WPc
ISO 13565
ISO 13565-2

 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk
ISO 12085
Roughness graph

 R,AR,R× ,Nr

Waviness graph

 W,AW,W×,Wte

Other graph

 Rke,Rpke,Rvke

AMSE >B46.1 

 2D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt
DIN EN ISO 4287-2010
Original profile

 Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,

Roughness

 Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,

Waviness

 Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
JIS B0601-2013
Original profile

 Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,

Roughness

 Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr

Waviness

 Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
GBT 3505-2009
Original profile

 Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,

Roughness

 Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr

Waviness

 Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr


3D Parameters


Standard

 Parameters
ISO 25178 Height
Sq,Ssk,Sku,Sp,Sv,Sz,Sa
function
Smr,Smc,S×p
Space
Sal,Str,Std

Composite parameters

 Sdq,Sdr
Volume
Vm,Vv,Vmp,Vmc,Vvc,Vvv
Form
Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv
Functional
Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq
ISO 12781 Flatness
FLTt,FLTp,FLTv,FLTq
EUR 15178N Amplitude
Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St
Space
Str,Std,Sal
Composite parameters
Sdq,Sds,Ssc,Sdr,Sfd
Area, Volume
Smr,Sdc
Function
Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq
Functional
Sbi,Sci,Svi
EUR 16145 EN Amplitude
SaSq,Sy,Sz,Ssk,Sku

Mixed parameters

 Ssc,Sdq

Functional

 Sbi,Sci

Space

 Sdsrw

Hardness

 Hs,Hvol
ASME B46.1 3D
St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt
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