- Description
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Details
TECHNICAL PARAMETERS
Model No.SuperView W5
Light SourceWhite LED
Video System1024x1024
Objective Lens10X, 20X
Optical Zoom0.5X (0.75X, 1X, 0.375X)
Field of View0.98x0.98mm (10X) XY Object
Table
Size400x400mm
Travel Range300x300mm
Load Capacity20kg
Control MethodMotorized Rotary Stage
Tilt±90°
Rotation360°
Load Capacity10kg
Control MethodMotorized Z Axis
Travel Range100mm
Control MethodMotorized
Z- Stroke Scanning Range10mm
Z Resolution0.1nm
Roughness RMS Repeatability*10.005nm Step Height
Measurement
Accuracy*20.5%
Repeatability*20.1% Working temperature
0~40°C fluctuation <2℃/h
Working Relative Humidity≤70% Remark:
*1 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178
*2 Measure standard 4.7μm steps height block in a laboratory environment according to the ISO 5436-1:2000Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.
StandardParameters ISO 4287-1997
Principal sectionRoughness W>aviness Amplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku
Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wkuinterval PSm,Pdq RSm,Rdq
WSm,WdqS>ubstance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4)
Wmr,Wdc,Wmr(Wz/4)Peak PPc RPc
WPcISO 13565
ISO 13565-2Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk ISO 12085
Roughness graphR,AR,R× ,Nr
Waviness graphW,AW,W×,Wte
Other graphRke,Rpke,Rvke AMSE >B46.1 2D
Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,WtDIN EN ISO 4287-2010 Original profile
Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,PmrRoughness
Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,RmrWaviness
Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,WmrJIS B0601-2013 Original profile
Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,PmrRoughness
Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,RmrWaviness
Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,WmrGBT 3505-2009 Original profile
Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,Roughness
Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,RmrWaviness
Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:
2D Parameters
StandardParameters ISO 4287-1997
Principal sectionRoughness W>aviness Amplitude Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku
Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,WkuInterval PSm,Pdq RSm,Rdq
WSm,WdqSubstance Pmr,Pdc Rmr,Rdc,Rmr(Rz/4)
Wmr,Wdc,Wmr(Wz/4)Peak PPc
RPcWPc ISO 13565
ISO 13565-2Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk ISO 12085
Roughness graphR,AR,R× ,Nr
Waviness graphW,AW,W×,Wte
Other graphRke,Rpke,Rvke
AMSE >B46.12D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt DIN EN ISO 4287-2010
Original profilePa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
RoughnessRa,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,
WavinessWa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr JIS B0601-2013
Original profilePa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
RoughnessRa,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
WavinessWa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr GBT 3505-2009
Original profilePa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,
RoughnessRa,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr
WavinessWa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr
3D Parameters
StandardParameters ISO 25178 Height
Sq,Ssk,Sku,Sp,Sv,Sz,Safunction
Smr,Smc,S×pSpace
Sal,Str,Std
Composite parametersSdq,Sdr Volume
Vm,Vv,Vmp,Vmc,Vvc,VvvForm
Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,ShvFunctional
Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,SmqISO 12781 Flatness
FLTt,FLTp,FLTv,FLTqEUR 15178N Amplitude
Sa,Sq,Sz,Ssk,Sku,Sp,Sv,StSpace
Str,Std,SalComposite parameters
Sdq,Sds,Ssc,Sdr,SfdArea, Volume
Smr,SdcFunction
Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,SmqFunctional
Sbi,Sci,SviEUR 16145 EN Amplitude
SaSq,Sy,Sz,Ssk,Sku
Mixed parametersSsc,Sdq
FunctionalSbi,Sci
SpaceSdsrw
HardnessHs,Hvol ASME B46.1 3D
St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt - Reviews
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Feature