- Description
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Details
Features and Advantages
● Grating ruler closed cycle control system
● Granitic base to guarantee the temperature stability
● Less running axles to ensure a long-term high precisionResolution
Detectability
500 nmSpatial resolution*
2 μm
Metrology accuracy9 + L/100 μm
X-ray source
Tube typeOpen, Reflection
Voltage300, 240, 225, 190, 160 kV
Detector1 (Flat panel)
Imaging area427 × 427 mm
Pixel matrix3073 x 3073 pixel
Sample
Maximum size600 x 550 mm(Diameter x Height)
Maximum weight25 kg
Equipment
Dimension
2770 x 1440 x 2040 mm(Length x Width x Height)Weight
7500 kg - Reviews
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Feature