- Description
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Details
SPECIFICATION
ModelEC5200 Rotary unit
Rotating methodPorous statistic pressure air bearing Accuracy
Theta-axis 0.05 μm (JIS B7451)
Radial-axis 1.5 μm / 50 mm, Radius from rotation center (mm)
Rotation speed1 - 10 rpm (Variable)
Indication of rotationmin. 0.1° Table
OperationAuto-centering, auto-tilting and auto-flattering
Table size600 x 500 mm
Table drive rangeX: ±300 mm, Y: ±70 mm
Centering range±70 mm
Tilting range±6mm / 340 mm (±1°)
Display unit0.01 mm
Measuring sizeMax. Ø730 mm
Loading sizeMax. Ø1050 mm
Load capacityMax. 200 kg Vertical column
Straightness0.6 μm / 200 mm (5 μm / 1000 mm)
Parallelism0.8 μm / 100 mm
Motion range1000 mm
Measuring heightMax. 1010 mm
Loading heightMax. 1050 mm
Display unit0.01 mm Horizontal arm
Motion range275 mm
Display unit0.001 mm Pick-up
(PU-UG5SC)
Measuring range1800 μm
ForceWithin 100 mN (10 gf) changeable Measuring magnification
100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50KAnalysis items
Roundness, Cylindricity, Coaxiality, Concentricity, Flatness, Squareness, Straightness, Parallelism, Run-out, Plane parallelism, Skiness, Cylinder block measurement - Reviews
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Feature