- Description
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Details
SPECIFICATION
ModelEC2500H EC2700H Rotary Table
Rotating methodPorous statistic pressure air bearing
OperationAuto-centering, auto-tilting and auto-flattering Accuracy
Theta-axis (0.02+0.0003H) μm H = Height from table surface (mm)Theta-axis (0.15+0.0003H) μm H = Height from table surface (mm)
Radial-axis (0.02+0.0003R) μm R = Radius from rotation center (mm)
Table sizeØ260 mm
Centering range±5 mm
Tilting range±1.2 °
Measuring sizeMax. Ø450 mm
Loading sizeØ600 mm
Load capacity60 kg Vertical column
Straightness0.10 μm / 100 mm （0.20 μm / 400 mm） 0.05 μm / 100 mm （0.15 μm / 400 mm）
Parallelism0.4 μm / 200 mm
Motion range400 mm
Max. measuring heightO.D. 570 mm I.D.420 mm
Display unit0.001 mm Horizontal arm
Motion range180 mm
Straightness0.45 μm / 100 mm 0.25 μm / 100 mm
Display unit0.001 mm Pick-up
(PU-UG5S)
Measuring range1800 μm
ForceWithin 100 mN (10 gf) changeable Measuring magnification
100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K
Analysis items
Roundness, Cylindricity, Coaxiality, Concentricity, Flatness, Squareness, Straightness, Parallelism, Run-out, Plane parallelism, Skiness
- Reviews
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Feature
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