- Description
-
Details
SPECIFICATION
ModelEC3600A EC3600B EC3600C Rotary Table
PurposeLarge diameter & long sample Large sample Large diameter sample
Rotating methodPorous statistic pressure air bearing
OperationAuto-centering, auto-tilting and auto-flattering Accuracy
Theta-axis (0.1+0.0006H) μm
H = Height from table (mm)Theta-axis (0.06+0.0006H) μm
H = Height from table (mm)-
Radial-axis (0.02+0.0003R) μm
R = Radius from rotation center (mm)
Table sizeØ400 mm Ø550 mm Ø620 mm
Measuring sizeMax. Ø400 mm Max. Ø450 mm Max. Ø450 mm
Loading sizeØ450 mm Ø630 mm Ø700 mm
Load capacity250 kg 150 kg 150 kg Vertical column Straightness
1.5μm / 200mm
(4μm / 1400mm)0.3μm / 100mm
(1μm / 600mm)0.15μm / 100mm
(0.4μm / 400 mm)
Parallelism5 μm / 1400 mm 1 μm / 200 mm
Motion range1400 mm 600 mm 400 mm
Max. measuring height1420 mm 770 mm 570 mm
Display unit0.001 mm Horizontal arm
Motion range180 mm
Straightness- 1 μm / 100 mm -
Display unit0.001 mm Pick-up
(PU-UG5S)
Measuring range1800 μm
ForceWithin 100 mN (10 gf) changeable Measuring magnification
100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K
Machine size (WxDxH) 900 x 710 x 2700 mm 1115 x 800 x1819 mm
1300 x 10000 x 1450 mmAnalysis items
Roundness, Cylindricity, Coaxiality, Concentricity, Flatness, Squareness, Straightness, Parallelism, Run-out, Plane parallelism, Skiness - Reviews
-
Feature