- Description
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Details
Surface roughness
Measuring range / Verticala resolutionZ: 800 μm / 0.08 nm
Drive speed0.05-2mm/s
StylusR2 μm 0.75 mN or Less
ContourAccuracy
Z: ±(2.5+0.5×|H|) μm or Less H: Displacement(mm)
X: ±(2.5+0.02L) μm or Less L: Measuring Length(mm)Measuring range
Z: 30 mm X: 510 mmStylus
R25 μm 10-30 mN - Reviews
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