- Description
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Details
Specification:Model
EF550-M50EF550-M58 EF550-M58D Accuracy
Z:0.25%(Our Standard) X:±(2.5 + 0.02L)μm or Less L=Measuring Length(mm)Resolution
Z:0.25μm, 0.1μm for X Axis ScaleStraightness
3.5μm/50 mm or Less
Sampling Points / PitchMax. 64,000 Points/Min. 0.5μm Measuring Range
Z:30mm, X: 50mm
Measuring MagnificationZ, X:1~2000 Positioning
Pick-up Up/Down- Manual Up/Down / 250mm Motorized and Manual Up/Down. Auto Stop / 250mm
Bed size- W600 × D315mm W600 × D315mm
Loading capacity- 70kg 70kg Analysis Items / Support Function
Distance (Ln-Pt / Pt-Pt), Pitch (Pt-Pt / Cr-Cr / Ip-Ip), Angle (Deg. 10 / 60・Ln-Ln)
Circle (Red/Dia), Alignment (Line/Point), Sensitivity Calibration / squareness Calibration / Stylus radius Calibration
Layout Print**, Analysis Macro, etcDrive Speed
0.02, 0.05, 0.1, 0.2, 0.5, 1, 2, 10mm/sec and ManualTraceable Angle
Ascend: 75°(Smooth Surface) Descend: 80°Pick-up
Stylus: R25μm Tungsten carbide, Axe type, Tip 6°/8°, Measuring Force: 10~30mN (Fixef by soft of stylus arm)Install Size/Weight
Measuring unit: W270 × D120 x H135mm / 6.3kg,
Amplifier: W240 x D405 x H190mm / 6kgW1500 × D850mm Measuring Unit: Approx 80kg Amplifier: Approx 6kg Power Supply
Single Phase AC90V-240V, 50/60Hz, 200VA - Reviews
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Feature