- Description
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Details
SPECIFICATION
ModelDSF-L800 Pick-up
(PU-LA4)
Detection methodSemiconductor laser scale
Measuring Range12 mm
Accuracy± (0.2+0.05H) μm, H = Z Displacement (mm)
Resolution0.75 nm
Straightness0.4 μm/100mm or Less
Measuring Force0.75 mN or less
Stylus arm (SA-41)Diamond, Tip radius: 2 μm ±25%, angle 60°
Stylus arm (SA-32)
Tungsten carbide, Tip radius: 25 μm ±15%, angle 25°
Measuring range: 24 mm
Resolution: 1.5 nm
Measuring force: 10 mN or lessOther function
Stylus motorized vertical movementDrive unit
Drive range100 mm
Accuracy± (1+0.02L) μm, L = Measuring Length (mm)
Scale resolution0.01 μm
Measuring speed0.02, 0.05, 0.1, 0.2, 0.5, 1.0, 2.0, 3.0 mm/s Driving speed
0.5, 30 mm/s (by remote controller), 80 mm/s (Selectable during macro measurement)
Drive motion operationRemote controller unti (equipped with manual fine adjust konb)
Dimensions / WeightW385 × D130 × H140 mm / 9 kg
Other functionX / Z direction collision detection Motorized column
Vertical motion range260 mm (equipped with manual fine adjust)
Vertical motion limitOperating range can be set by software Vertical motion speed
0.05 - 50 mm/s
10, 50 mm/s (by remote controller, Up)
5, 30 mm/s (by remote controller, Down)
Vertical motion operationRemote controller switch
Auto-stop accuracy±0.2 µm (Using skid, vertical magnification set at100,000 times) Dimensions / Weight
W 650 × D 335 × H 774 mm / 75 kg
Maximum load70 kg
Depth from pick-up105 mm
Bed materialGabbro
Installation areaW1580 x D800 mm
Power SupplySingle Phase AC90V-240V, 50/60Hz, 200VA Analysis items
1) JIS B06011982 - Ra, Rmax, Rz
2) JIS B06011994 - Ra, Ry, Rz, S, Sm, tp
3) JIS B0610-1987 - Wca, Wcm, Wem, Wea
4) JIS B0601-2013 (JIS B0601-2001, ISO 42871997) - Pp, Pv, Pz, Pc, Pt, Pa, Pq, Psk, Pku, PPc, PSm, PΔq, Pmr(c), Pδc, Pmr, Rp, Rv, Rz, Rc, Rt, Ra, Rq, Rsk, Rku, RPc, RSm, RΔq, Rmr(c), Rδc, Rmr, Wp, Wv, Wz, Wc, Wt, Wa, Wq, Wsk, Wku, WPc, WSm, WΔq, Wmr(c),Wδc, Wmr
5) JIS B0631-2000 - AR, R, Rx, Rke, Rpke, Rvke
6) JIS B0671-1, -2, -3, -2002 (ISO 13565-1, -2, -3, -1996) - Rk, Rpk, Rvk, Mr1, Mr2, Rpq, Rvq, Rmq
7) ISO 12085, 1996 - AR, R, Rx, Rke, Rpke, Rvke
8) ASME B46.1・11995 - Ra, Rq, Rt, Rp, Rv, Sm, Pc, Rsk, Rku, tp, HSC,Δq,Δa, Rmax, Rz, Rpm, λa, λq, Wt, Wa, Wq, Wp, Wv, Wmr(c)
9) Amcro-function, Remote control function (Coordinate display, Emergency switch, Auto up/down, Control of drive unit and motorized column)
10) Free-layout printed, Warning buzzer at overscale, Save format (CSV, DXF)
11) Alignment, Element analysis, Scalar analysis, Pitch analysis, Area analysis, Ball screw analysis and Statistical analysis, Arithmetic operation
3D ROUGHNESS MEASUREMENT (OPTIONAL)
Motorized stage (RAF-22D)
Dimensions of stage150 × 150 mm
Leveling range±1°(X,Y)
Motion range of the stage50 mm
Minimum stepping range1 µm
Maximum load5 kg
Dimensions / WeightW312 × D150 × H70 mm / 8 kg Analysis items
Flat map - Direct contour map, Monochrome contour map,Differential contour map
Bird’ s eye view - Scan display, Halftone dot meshing display,Contour display, Differential scatter display
3D parameter - SRp, SRv, SRmax, Sra, SGr, SSr, SRz, SRq, SRsk, SΔa, Sλa, Spc
Particle analysis - Histogram of Peak (Valley) Number of particle (1 level mode), Density of particle, Average of square, Average of Volume, Average of diameter (Plural level mode),Each graphic display and the list of values
Graph - FFT, BC - Reviews
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Feature