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 - China
Profile Projector, VMS, CMM and Measuring Microscope
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Supra Optix Interferometer
Scanning White-light Interferometric Microsope
The Supra Optix is the latest development in the field of scanning White-Light Interferometry with the features of compact flexible design, high speed and user friendly. 3D measurement up to 400μm vertical scanning range with nanometer resolution.
The Supra Optix supports new application in quantitative surface analysis in Wafer, DVD disk, MEMs structure, LCD/CF Micro structure, High Density Connected PCB, IC Package and also many other application in materials and surface research.
High Speed Scanning and Processing Software (ImgScan)
- ImgScan integrated with scaanning hardware interpret the interference frings.
- Innovative patented analysis software with vertical resolution to to 0.1nm.
- High Speed Scanning Analysis design and algorism
- Easily selecting vertical scanning range
- Optional 10X, 20X and 50X interfermetric objective lens
- Easy sample posiitoning by on-screen digital XYZ coordinate display
- Manual / Automatic light intensity adjustment for optimal interfering fringe contrast.
- High precision PVSI mode and high speed VXI model are selectable.
- Patented algorihm are developed to analyze haft-transparent sample.
- Automatic patching
- User selectable scanning directions
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Specification:
| Model |
SWIM 1510MS |
| Configuration |
Microscope, Scanning controller, Stage, Imaging unit, Computer |
| Microscope body |
Mono microscope(standard) |
| Interference objectives (option) |
Magnification |
FOV(mm) |
Optical resolution(μm) |
| 10X |
1 |
1.12 |
| 20X |
0.5 |
0.84 |
| 50X |
0.2 |
0.61 |
| Vertical scanning controller |
Scanning range |
100μm (400μm optional) |
| Scanning resolution |
0.1nm |
| Scanning mode |
Automatic |
| Light intensity adjustment |
Automatic/Manual |
| Sample Stage |
X-Y stage |
150mm*100mm, manual(standard) with linear Scale (1μm) |
| X-Y position counter |
Linear scale exchanger with USB interface |
| Tilt stage |
Manual |
| Imaging unit |
Image sensor |
Area CCD (standard) |
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Sensor resolution |
640*480 pixels (standard) |
| Computer |
Pentium-computer, 17"LCD Monitor, 200GB Hard disk driver |
| Analysis Software |
MS-Windows compatible data acquisition and analysis software, including ISO roughness /step –height analysis, FFT and filtering, Various 2D and 3D views, profile analysis, zooming, conversion to standard image formats, etc. |
| Step-height standards |
50nm 、170nm 、230、470、1800mm |
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