 Micro figure Measuring Instrument SURFCORDER |
||
 |
ET4000, excellent in accuracy, stability and functionality, is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application. ET4000 series can be selected from a number of models according to applications. - ET4000A: Multifunctional and automatic - ET4000L: Fully automatic, compatible with large precision glass or wafer size sample - ET4000M: Reasonable, high performance and general-use |
|
| Max. sample size | 210 x 210 mm to 300 x 400 mm | |
| Repeatability | 1 σ within o.5 nm | |
| Measuring range | Z: 100 μm X: 100 mm (Y stroke: 150 to 400mm) | |
| Resolution | Z: 0.1 nm X: 0.01 μm | |
| Measuring force | 0.50 μN to 500 μN | |
