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White light interferometer mode:
- Measuring field:
130 µm x 130 µm...2.1 mm x 2.1 mm
- Number of measuring points:
- 1,024 x 1,024
- Vertical measurement range:
up to 500 µm
- Vertical resolution:
range up to 100 µm: < 25 nm
100 - 500 µm: < 2 µm
- Step height measuring accuracy:
range up to 100 µm: < 2 nm
100-500 µm: < 25 nm
- Vertical scan rate:
up to 2 µm/s, typ. 1 µm/s
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Phase shift mode:
- Measuring field:
130 µm x 130 µm ... 2.1 mm x 2.1 mm
- Number of measuring points:
- 1,024 x 1,024
- Maximum stage height:
120 nm
- Vertical measurement range:
12 µm
- Vertical resolution:
< 1 nm
- Measuring time:
< 10 s
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